Presentation details

Recent progress in MEMS X-ray optics

Presentation duration: 15 minutes

Presenter: Yuichiro Ezoe

Recent progress in fabrication technologies of ultra light-weight and high angular resolution micropore optics based on micromachining technologies is reported.

Yuichiro Ezoe, Kazuhisa Mitsuda, Takaya Ohashi, Makoto Mita, Ikuyuki Mitsuishi, Utako Takagi, Kensuke Ishizu, Teppei Moriyama, Kohei Morishita, Kazuo Nakajima, Yoshiaki Kanamori, Raul Riveros, Hitomi Yamaguchi, Mitsuhiro Horade, Susumu Sugiyama, Ryutaro Maeda

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