Presentation details

Progress in MEMS X-ray optics

Presentation duration: 15 minutes

Presenter: Yuichiro Ezoe

We present recent progress in what we call MEMS X-ray optics that we invented in 2007 (Ezoe et al., 2008 AXRO, Mitsuishi et al., 2009 SPIE, Ezoe et al., 2010 Micro Sys. Tech.).

MEMS X-ray optics team

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